Product introduction

The Lighting automatic match network device is designed to automatically convert the impedance (capacitive or inductive) of the plasma chamber into a state where the RF power source can output the maximum power. The Lighting auto-matcher is designed to provide the impedance that enables it to output maximum power for RF power sources with a frequency range of 1MHz to 81MHz and a power range of 100W to 30kW.

The Lighting automatic match network adopts an all-digital control mode, which greatly improves the matching speed and matching accuracy, and also greatly increases the flexibility of the application.

The Lighting automatic match network adopts an optimization algorithm, which can adjust the speed of the capacitor according to the impedance of the load while avoiding the interference problem between multiple matchers commonly existing in PECVD equipment, achieving faster and more accurate matching effect and improving Lighting automatic matching. stability and service life of the device.

Lighting automatic match network device mainly adopts L-shaped topology, which has a wide matching range and even small impedance; it can be widely used with various capacitive or inductive impedances; it is typically used in plasma etching, PECVD, radio frequency Typical processes for semiconductor and solar thin films such as sputtering, parallel plate, RF laser, ICP, RIE, CVD and PVD.

The Lighting automatic match network device uses vacuum power devices that can withstand high current and high voltage, so that it can work under high current and high voltage conditions. At the same time, these vacuum power devices can provide the Lighting automatic match network device with more accurate matching than air capacitors. Thus, the reflected power is greatly reduced.

The Lighting automatic match network device can monitor the self-bias voltage and RF peak voltage of the plasma cavity in real time, and provide real-time self-bias and peak signals for the RF power source.

The Lighting automatic match network adopts the technology of delay and fixed-point sampling. Even if the RF power supply works in the pulse mode, it does not affect the matching speed and effect.

Size

Electrical specifications

 Heat dissipation and environmental specifications