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Product Introduction
The Auto-Match automatic matcher is designed to automatically convert the impedance (capacitive or inductive) of the plasma chamber into a state that enables the RF power source to output the maximum power. The Auto-Match automatic matcher is designed to provide the RF power source with the frequency range from 1MHz to 81MHz and the power range from 100W to 10kW to provide the impedance that can make it output the maximum power.
The Auto-Match automatic matcher adopts a fully digital control mode, which greatly improves the matching speed and matching accuracy, and also greatly increases the flexibility of application.
The Auto-Match automatic matcher adopts an optimized algorithm that can adjust the capacitor speed according to the impedance of the load while avoiding the interference problem between multiple matchers that is common in PECVD equipment, achieving faster and more accurate matching effects and improving Auto -The stability and service life of the Match automatic matcher.
The Auto-Match automatic matcher mainly adopts the L-shaped topology structure, which has a wide matching range, even a small impedance; it can be widely used with various capacitive or inductive impedances; it is typically used in plasma etching, PECVD , Radio frequency sputtering, parallel plate, radio frequency laser, ICP, RIE, CVD and PVD and other semiconductor and solar thin film typical processes.
The Auto-Match automatic matcher uses vacuum power devices that can withstand high current and high voltage, so that it can work under high current and high voltage. At the same time, these vacuum power devices can provide Auto-Match automatic matchers with more than air capacitors. Precise matching, thereby greatly reducing the reflected power.
The Auto-Match automatic matcher can monitor the self-bias voltage and RF peak voltage of the plasma chamber in real time, and provide real-time self-bias and peak signals for the RF power source.
Auto-Match automatic matcher adopts delay and fixed-point sampling technology, even if the RF power supply works in pulse mode, it will not affect the matching speed and effect.
Product Specification Form
Describe | Product specifications |
Matcher installation | Install directly on the plasma chamber; Or install to the reserved mounting plate |
Size | 510mm X 400mm X 178mm (Length X Width X Height) |
Connection connector specifications | |
User Port connector on the front panel | DB15 female |
RS232 communication connector | DB15 female |
RF IN input connector on the front panel | 7/16 coaxial connector female |
RF OUT output connector on the rear panel | 7/16 coaxial connector female or customized according to customer requirements |
AC MAINS input on the front panel | IEC 320 connector |
Internal inductance specifications and topology | |
Topology | L type, as shown in Figure 1-2 |
Tap inductance | 3 turns with three taps |
Output inductance | 3 to 14 laps, choose according to customer needs |
Product electrical specification sheet
Describe | Product specifications |
Working frequency | 13.56MHz±5% |
AC MAINS input voltage | 100VAC to 240VAC single phase |
Describe | Product specifications |
AC MAINS Input frequency | 50Hz ~60Hz |
AC MAINS Input Current | 0.7A ~1.0A |
Maximum transmission power | 5000W |
Maximum RF load voltage | 2000Vpk |
Maximum RF load current | 45A RMS |
The input impedance of the RF power source | 50ohm |
Match time | <3s,in any circumstances <2s,In preset position |
Match range | Real part: +1Ω to +45Ω Imaginary part: -220jΩ to +100jΩ (It is necessary to determine the specific impedance range required by Generator Research technicians according to the customer's load condition) |
Reflected power after automatic matching | Less than 1% of the set power value |
Matcher under different power Safety range | Generator Research technicians will determine the safety range of the matcher at different power levels according to the specific impedance range used by the customer |
Heat dissipation and environmental specifications
Describe | Specification |
Cooling method | Air-cooled |
Minimum air flow | 150 square meters per hour |
Operating environment temperature | +5℃ to +40℃ |
Operating environment humidity | 5% to 70% |
Operating ambient air pressure | 78kPa~106kPa |
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