Product introduction

Universal RF generator is a new generation of multifunctional all-solid-state RF power supply for semiconductor production and plasma processes; using fully digital control technology. Typical processes used in plasma etching, PECVD, RF sputtering, parallel plate, RF laser, ICP, RIE, CVD and PVD and other semiconductor and solar thin films.

Universal RF generator adopts advanced high-efficiency and high-stability RF power amplifier technology. This technology can effectively reduce power loss and increase the life of the equipment.

Fast and intelligent standing wave (VSWR) protection function, the standing wave protection of Universal series RF generator can start quickly within milliseconds after the load is abnormal, and can timely and reliably protect the RF generator from abnormal load (such as load overloading). Fire, cavity mutation or matcher instability, etc.) and damage; and after the load is restored, the radio frequency power supply can automatically release the standing wave within milliseconds to restore the normal output, and the whole process does not require human intervention.

High reliability, Universal series RF generator has more than 20% output power margin, thus ensuring long-term stable operation.

Advanced RF power measurement system. The measurement system of Universal series RF generator adopts V/I Sensor measurement technology. Compared with the common directional coupler measurement technology, this measurement technology has the advantages of high sensitivity and high accuracy. Measure incident and reflected power.

Wider power output range, Universal series RF generator adopts advanced power amplifier technology, the output power of the RF generator can be adjusted from 1%, and the output power range is continuously adjustable from 1% to the maximum output power.

Universal RF generator can work in two modes of incident power regulation and load power regulation. In addition, two different control methods are available:

Remote control: support analog control, RS232 and network port

Panel control: use the switch on the front panel, the RF POWER power adjustment knob, and the LED display;

Size

Electrical specifications

Heat dissipation and environmental specifications