• Universal RF generator 3013PSA
Universal RF generator 3013PSA

Universal RF generator 3013PSA

Universal 3013 series RF generator has the following characteristics: 1. Full digital control 2. Pulse working mode, supporting pulse synchronization of multiple machines 3. Frequency modulation function, the frequency variation range is 13.56MHz±5%, and automatic matching function can be realized by frequency sweeping 4. Real-time power and load impedance measurement 5. Arc extinguishing function

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Overview
Universal 3013 series RF generator has the following characteristics: 1. Full digital control 2. Pulse working mode, supporting pulse synchronization of multiple machines 3. Frequency modulation function, the frequency variation range is 13.56MHz±5%, and automatic matching function can be realized by frequency sweeping 4. Real-time power and load impedance measurement 5. Arc extinguishing function
Details

Product introduction

Universal RF generator is a new generation of multifunctional all-solid-state RF power supply for semiconductor production and plasma processes; using fully digital control technology. Typical processes used in plasma etching, PECVD, RF sputtering, parallel plate, RF laser, ICP, RIE, CVD and PVD and other semiconductor and solar thin films.

 

Universal RF generator adopts advanced high-efficiency and high-stability RF power amplifier technology. This technology can effectively reduce power loss and increase the life of the equipment.

 

Fast and intelligent standing wave (VSWR) protection function, the standing wave protection of Universal series RF generator can start quickly within milliseconds after the load is abnormal, and can timely and reliably protect the RF generator from abnormal load (such as load overloading). Fire, cavity mutation or matcher instability, etc.) and damage; and after the load is restored, the radio frequency power supply can automatically release the standing wave within milliseconds to restore the normal output, and the whole process does not require human intervention.

 

High reliability, Universal series RF generator has more than 20% output power margin, thus ensuring long-term stable operation.

 

Advanced RF power measurement system. The measurement system of Universal series RF generator adopts V/I Sensor measurement technology. Compared with the common directional coupler measurement technology, this measurement technology has the advantages of high sensitivity and high accuracy. Measure incident and reflected power.

 

Wider power output range, Universal series RF generator adopts advanced power amplifier technology, the output power of the RF generator can be adjusted from 1%, and the output power range is continuously adjustable from 1% to the maximum output power.

 

Universal RF generator can work in two modes of incident power regulation and load power regulation. In addition, two different control methods are available:

Remote control: support analog control, RS232 and network port

Panel control: use the switch on the front panel, the RF POWER power adjustment knob, and the LED display;



Size

Describe

Product specification

Installation

Universal 3013 front panel provides mounting holes for 19-inch standard chassis

Size

556(L×483(W×132(Hmm

Connector specifications

Analogic I/O connector on rear panel

DB25 female

CEX IN & CEX OUT connectors on rear panel

SMA female

RF OUT output connector on the rear panel

50Ω type 7/16 coaxial connector female

AC MAINS input on rear panel

Over 3kW directly lead out the power line

Display on the front panel

LED display

 

Electrical specifications

Describe

Product specification

Input power specification

AC MAINS input voltage

380Vac three-phase

AC MAINS input frequency

50Hz to 60Hz

AC MAINS input current

20Arated power

Output power specification

Output impedance

50Ω

Output power

3000W,output into 50Ω load

Power rise and fall time

<10ms

Input overcurrent protection for RF power supplies

240A

Efficiency

>65%,full power output into 50Ω load

Pulse function (optional)

Pulse working mode pulse frequency

0-50KHz

Pulse duty cycle

0.1%-99.9%

Minimum pulse width time

10us

Pulse maximum overshoot

<10%

RF output specifications

Output frequency

13.56MHz±5%(frequency sweep function is optional)

Matching time in FM working mode

<100ms

Minimum output power

30WNoteUniversal 3013 can work below 30W, but the accuracy cannot be guaranteed

Maximum reflected power

600W

Harmonic

When rated output into 50Ω load, all harmonics are 45dB lower than RF output signal

RF output power stability

1% of the set power or 3W, whichever is greater

CEX specification

CEX IN & CEX OUT signals

TTL

ARC extinguishing function

Optional

 

Heat dissipation and environmental specifications

Describe

Product specification

Cooling method

Air-cooled and water-cooled

Minimum air flow

150 cubic meters per hour

Operating ambient temperature

+5°C to +40°C

Operating environment humidity

5% to 70%

Operating ambient air pressure

78kPa to 106kPa

Cooling water temperature

+20°C to +30°C

Water velocity

>5 liters per minute

Water pressure

>2bar (29psi)