Product Introduction

• Universal RF power supply is a new generation of multi-functional all-solid-state RF power supply used in semiconductor production and plasma technology; it uses all-digital control technology. Typical applications include plasma etching, PECVD, radio frequency sputtering, parallel plate, radio frequency laser, ICP, RIE, CVD, PVD and other semiconductor and solar thin film processes.

  
  

• Universal RF power supply adopts advanced high-efficiency and high-stability RF power amplifier technology. This technology can effectively reduce power loss and increase the life of the equipment.

  
  

• The fast and intelligent standing wave (VSWR) protection function can timely and reliably protect the RF power supply from damage due to load abnormalities; and after the load is restored, the RF power supply can automatically release the standing wave and resume normal output within milliseconds. The whole process does not require human intervention.
  

  
  

• High reliability, the Universal series RF power supply has an output power margin of more than 20%, so as to ensure long-term stable work.

  
  

• Advanced RF power measurement system. The measurement system of Universal series RF power supply adopts V/I Sensor measurement technology. Compared with common directional coupler measurement technology, this measurement technology has the advantages of high sensitivity and high accuracy, and can be more accurate. Measure incident and reflected power.
  

  
  

• For a wider power output range, the Universal series of RF power supplies adopt advanced power amplifier technology. The output power of the RF power supply can be adjusted from 5W, and the output power range is from 5W to the maximum output power continuously adjustable.

  
  

• Universal RF power supply can work in two modes: incident power regulation and load power regulation. In addition, two different control methods are provided:
  

1. Remote control: support analog control, RS232 and network port

2. Panel control: use the RF ON/RF OFF switch, RF POWER power adjustment knob, FWD/REF power LED display on the front panel;

Product electrical specification sheet

 Heat dissipation and environmental specifications